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Fabrication of Silicon Microprobes for Optical Near-Field Applications

By Minh, Phan Ngoc

Fabrication of Silicon Microprobes for Optical Near-Field Applications Business & Technology

Fabrication of Silicon Microprobes for Optical Near-Field Applications

0 - Default Title
Description
Based upon the authors' own research and experiments, this book develops several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20 nanometers. They have investigated in detail the probes' optical performance characteristics and show how silicon probes overcome the limitations of the optical fiber probes in terms of production throughput, optical throughput, reproducibility, simplicity of instrumentation, and mechanical performance.
Product details
Edition:
illustrated
Number of Pages:
194
Release Date:
2002-01-15
Publication Date:
2002-01-15
Publisher:
CRC Press
Languages:
Original: English
ISBN10:
0849311543
ISBN13:
9780849311543
GPSR Manufacturer Reference:
[email protected]
Weight:
461 g
Height:
161 cm
Width:
240 cm
Thickness:
15 cm
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