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Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications

By Kamaljeet Singh

Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications

By Kamaljeet Singh

0 - Default Title
Description
This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology.
Product details
Number of Pages:
180
Release Date:
2025-07-22
Publication Date:
2025-07-22
Publisher:
Springer Nature Singapore
Languages:
Original: English
ISBN10:
9819661617
ISBN13:
9789819661619
GPSR Manufacturer Reference:
[email protected]
Weight:
472 g
Height:
160 cm
Width:
241 cm
Thickness:
15 cm
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