Placeholder text

Go to cart

Development of CMOS-MEMS/NEMS Devices

By Jaume Verd

Product Image: Development of CMOS-MEMS/NEMS Devices

Development of CMOS-MEMS/NEMS Devices

By Jaume Verd

0 - Default Title
Description
Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]
Product details
Binding:
Paperback
Number of Pages:
166
Release Date:
2019-06-25
Publication Date:
2019-06-25
Publisher:
MDPI AG
Languages:
Original: English
ISBN10:
3039210688
ISBN13:
9783039210688
GPSR Manufacturer Reference:
[email protected]
Weight:
437 g
Height:
170 cm
Width:
244 cm
Thickness:
11 cm
Buy on Amazon
Currently sold out