Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures

Name: Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures
Brand: Springer
Availability: OutOfStock
Rating: 5 (1 reviews)

By Joachim Frühauf

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Product details

Edition:

1

Number of Pages:

234

Release Date:

2004-10-12

Publication Date:

2004-10-12

Publisher:

Springer

Languages:

Published: English, Original: English

ISBN10:

3540221093

GPSR Manufacturer Reference:

[email protected]

Weight:

476 g

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