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Microsystem Technology and Microrobotics

By Sergej Fatikow

Microsystem Technology and Microrobotics Computer Science

Microsystem Technology and Microrobotics

By Sergej Fatikow

0 - Default Title
Description
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
Product details
Binding:
Paperback
Edition:
1
Number of Pages:
424
Release Date:
2010-12-03
Publication Date:
2010-12-03
Publisher:
Springer Berlin Heidelberg
Languages:
Original: English
ISBN10:
3642082327
ISBN13:
9783642082320
GPSR Manufacturer Reference:
[email protected]
Weight:
639 g
Height:
155 cm
Width:
235 cm
Thickness:
23 cm
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