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Microsystem Technology and Microrobotics

By Sergej Fatikow

Microsystem Technology and Microrobotics Computer Science

Microsystem Technology and Microrobotics

0 - Used - good
Description
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
Product details
Edition:
1
Number of Pages:
428
Release Date:
1997-03-20
Publication Date:
1997-03-20
Publisher:
Springer Berlin Heidelberg
Languages:
Original: English
ISBN10:
3540606580
ISBN13:
9783540606581
GPSR Manufacturer Reference:
[email protected]
Weight:
805 g
Height:
160 cm
Width:
241 cm
Thickness:
28 cm
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