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McGuire, G: SEMICONDUCTOR MATERIALS & PROC

By McGuire, Gary F.

McGuire, G: SEMICONDUCTOR MATERIALS & PROC

By McGuire, Gary F.

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Description
A broad review of semiconductor materials and process technology with emphasis on VLSI and ULSI. Contents include: Silicon Materials Technology Thermal Oxidation of Silicon and Other Materials CVD of Silicon and its Compounds Chemical Etching and Slice Cleanup of Silicon Plasma Processing PVD Metallization for VLS Interconnect and Packaging Characterization of Semiconductor Materials.
Product details
Edition:
1
Number of Pages:
688
Release Date:
1988-12-31
Publication Date:
1988-12-31
Publisher:
William Andrew
Languages:
Published: English, Original: English
ISBN10:
0815511507
ISBN13:
9780815511502
Weight:
1089 g
Height:
161 cm
Width:
233 cm
Thickness:
40 cm
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