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Highly Sensitive Vertical Hall Sensors in CMOS Technology (Series in Microsystems)

By Enrico Schurig

Highly Sensitive Vertical Hall Sensors in CMOS Technology (Series in Microsystems)

0 - Default Title
Description
This book describes the principles how to obtain in CMOS technology highly sensitive Hall sensors that can measure surface-parallel magnetic field components, the so-called vertical Hall sensors (VHS). It gives theoretical and practical guidelines for the VHS design in order to achieve sensitivities as high as SI =400 V/(AT) and SV=0.04V/(VT) without any modification of the CMOS process. A new innovative design for VHS is presented using six sensor contacts instead of the traditional ones using four or five. The developed Hall devices have been successfully integrated into electronic circuitry for signal treatment. The book also presents a systematic study of the sensor offset and the compensation methods, in particular the so-called spinning-current method. Using these techniques the VHS can obtain residual offset values as low as 200m T for a bias voltage of about 2V. Based on the developed Hall sensor, two completely integrated microsystems are presented. The first one for 2-axial magnetic field measurements demonstrates the feasibility of a contactless angular encoder with a precision better than 0.8° without any special calibration in the temperature range of –30°C to 100°C. The second one is the first fully CMOS integrated single-chip 3D Hall probe. Keywords: Hall sensors, CMOS technology, integrated magnetic sensors.
Product details
Binding:
Paperback
Edition:
1
Number of Pages:
214
Release Date:
2005-12-15
Publication Date:
2005-12-15
Publisher:
Hartung-Gorre
Languages:
Published: English, Original: English
ISBN10:
3866280238
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