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Fundamental Principles of Optical Lithography: The Science of Microfabrication
By Chris Mack
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Description
By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.
This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.
Product details
Binding:
Paperback
Edition:
1
Number of Pages:
534
Release Date:
2012-05-15
Publication Date:
2012-05-15
Publisher:
JW
Languages:
Published:
English,
Original:
English
ISBN10:
0470727306
GPSR Manufacturer Reference:
Weight:
892 g
Condition
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Acceptable
Items bear visible signs of previous use, be it through distinctive notes or scratches on the surface. Despite these signs of wear, the items remain functional and tell a story of their previous owner with each scratch.
€45,99