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Glow Discharge Processes: Sputtering and Plasma Etching

Glow Discharge Processes: Sputtering and Plasma Etching

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Product details
Edition:
1
Number of Pages:
432
Release Date:
1980-11-05
Publication Date:
1980-11-05
Publisher:
Wiley-Interscience
Languages:
Published: English, Original: English
ISBN10:
047107828X
GPSR Manufacturer Reference:
Weight:
794 g
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