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Excimer Laser Technology
By Dirk Basting
0 - Default Title
Description
A timely and comprehensive survey, Excimer Laser Technology reports on the current status and range of the underlying technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F 2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. Because it offers an effective and understandable introduction to the current and future status of the field, Excimer Laser Technology is valuable reading for laser technology students, process application researchers, engineers or anyone interested in this increasingly important area.
Product details
Edition:
1
Number of Pages:
433
Release Date:
2005-04-21
Publication Date:
2005-04-21
Publisher:
Springer Berlin
Languages:
Original:
English
ISBN10:
3540200568
ISBN13:
9783540200567
GPSR Manufacturer Reference:
Weight:
1800 g
Height:
155 cm
Width:
235 cm
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