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Fabrication Engineering at the Micro- And Nanoscale

By Campbell, Stephen A.

Fabrication Engineering at the Micro- And Nanoscale

By Campbell, Stephen A.

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Description
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
Product details
Binding:
Paperback
Edition:
4
Number of Pages:
690
Release Date:
2012-11-15
Publication Date:
2012-11-01
Publisher:
Oxford University Press
Languages:
Original: English
ISBN10:
0199861226
ISBN13:
9780199861224
Weight:
1266 g
Height:
191 cm
Width:
235 cm
Thickness:
37 cm
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