{"product_id":"f-larry-thompson-introduction-to-microlithography-theory-materials-and-processing-acs-symposium-series-9780841207752","title":"Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)","description":null,"brand":"American Chemical Society","offers":[{"title":"Default Title","offer_id":53822587961686,"sku":null,"price":0.0,"currency_code":"EUR","in_stock":false}],"url":"https:\/\/www.momoxbooks.com\/products\/f-larry-thompson-introduction-to-microlithography-theory-materials-and-processing-acs-symposium-series-9780841207752","provider":"momoxbooks","version":"1.0","type":"link"}