{"product_id":"f-gary-mcguire-mcguire-g-semiconductor-materials-proc-9780815511502","title":"McGuire, G: SEMICONDUCTOR MATERIALS \u0026 PROC","description":"A broad review of semiconductor materials and process technology with emphasis on VLSI and ULSI. Contents include: Silicon Materials Technology Thermal Oxidation of Silicon and Other Materials CVD of Silicon and its Compounds Chemical Etching and Slice Cleanup of Silicon Plasma Processing PVD Metallization for VLS Interconnect and Packaging Characterization of Semiconductor Materials.","brand":"William Andrew","offers":[{"title":"Default Title","offer_id":53767058096470,"sku":null,"price":0.0,"currency_code":"EUR","in_stock":false}],"url":"https:\/\/www.momoxbooks.com\/products\/f-gary-mcguire-mcguire-g-semiconductor-materials-proc-9780815511502","provider":"momoxbooks","version":"1.0","type":"link"}